February 2018 edition – Vol.10 no.2


We remind you that the submission of articles for the 16th NEWCAS conference is open and the deadline has been extended to March 5, 2018. The ReSMiQ Executive Committee encourages all members of the Center to submit their contributions and to participate in large number (Paper submission). We are also organizing our annual symposium and scientific poster competition, the deadline for the call for papers is April 9th. Visit the web page (resmiq.org > Students > Scientific poster competition) for more details.

ReSMiQ is a group of researchers in an interuniversity research center that can count on the support of the Fonds de recherche du Québec – Nature et technologies (FRQNT) and nine (9) Quebec universities involved in microsystems research.


– Dr. Massicotte from UQTR organizes a symposium at the ACFAS Congress entitled “Internet des Objets et Technologies au service de la santé et du maintien à domicile” to be held on May 7, 2018 at the Université du Québec à Chicoutimi. More details


Scientific poster competition
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Scholarships and financial support

Financial support for undergraduate students
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Financial support for conference participants
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SIGNAL is the main monthly information medium of the Microsystems Strategic Alliance of Québec (ReSMiQ). This newsletter aims to be an active link between the members of ReSMiQ and all individuals who have an interest in research and innovation in microsystems. We commit ourselves to promote in it our members’ research and increase ReSMiQ’s visibility.

ReSMiQ is a group of researchers in an interuniversity research center that can count on the support of the Fonds de recherche du Québec – Nature et technologies (FRQNT) and nine (9) Quebec universities involved in microsystems research.

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Call for contributions

16th IEEE International NEWCAS Conference (NEWCAS),
from June 24 to 27, 2018, Montréal, Canada.
Submission deadline : March 5, 2018.
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61st IEEE International Midwest Symposium on Circuits and Systems (MWSCAS),
from August 5 to 8, 2018, Windsor, ON, Canada.
Submission deadline : March 18, 2018.
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IEEE Biomedical Circuits and Systems Conference (BioCAS2018),
from October 17 to 19, 2018, Cleveland, U.S.A.
Submission deadline : March 18, 2018.
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IEEE Life Science Conference (LSC2018),
from October 28 to 30, 2018, Montréal, Canada

Submission deadline : June 4, 2018.
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Call for participation

31st Canadian Conference on Electrical & Computer engineering (CCECE),
from May 13 to 16, 2018, Québec, Canada.
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2018 International Symposium on Circuits and Systems (ISCAS),
from May 27 to 30, 2018, Florence, Italy.

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The 31st International Conference on Industrial, Engineering & Other Applications of Applied Intelligent Systems (IAE-AIE2018)
Du 25 au 28 juin 2018, Montréal, Canada.
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Prof. Michaël Ménard
Université du Québec  Montréal

Member of ReSMiQ since 2013

Michaël Ménard received his Ph.D. in Electrical Engineering from McGill University, Montreal, Canada. Currently, he is an Associate Professor in the Department of Computer Science at the University of Quebec in Montreal (UQAM) and Adjunct Professor at the École de technologie supérieure (ÉTS). He is a member of the Research Center in Microsystems Design and Manufacturing (CoFaMic) and NanoQAM at UQAM, LabMicro2 at ETS, and the Center for Optics, Photonics and Laser (COPL). He was R&D Director at the company Aeponyx Inc. His current research interests are mainly in integrated optics, silicon photonics, optical telecommunications and interconnections, microfabrication, nonlinear optics and optical sensors. Professor Menard has authored or co-authored more than 50 articles in peer-reviewed international conferences and journals and has filed six patents. He has been a member of several grant review committees and a reviewer of several scientific journals. Professor Menard received the Celebrate Partnership Award in recognition of his collaboration with industry and the Distinction of the Quebec Association for the Development of Research and Innovation.

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Below is a selection of publications in recent years followed by representative work.

  1. Briere, M.Y. Elsayed, Saidani, M. Bérard, P.-O. Beaulieu, H. Rabbani-Haghighi, F. Nabki, M. Ménard, ”Rotating circular micro-platform with integrated waveguides and latching arm for reconfigurable integrated optics. Micromachines (2017).
  2. Boroojerdi, M. Ménard, and A. Kirk, "Two-period contra-directional grating assisted coupler," Opt. Express 24, 22865-22874 (2016).
  3. Boroojerdi, M. Ménard, and A. Kirk, "Wavelength tunable integrated add-drop filter with 10.6 nm bandwidth adjustability," Opt. Express 24, 22043-22050 (2016).
  4. Hai, M. Ménard, and O. Liboiron-Ladouceur, "Integrated optical deserialiser time sampling based SiGe photoreceiver," Opt. Express 23, 31736-31754 (2015).
  5. Ophir, R. Lau, M. Menard, X. Zhu, K. Padmaraju, Y. Okawachi, R. Salem, M. Lipson, A. Gaeta, and K. Bergman, "Wavelength conversion and unicast of 10-Gb/s data spanning up to 700 nm using a silicon nanowaveguide," Opt. Express 20, 6488-6495 (2012).
  6. Xu, N. Ophir, M. Menard, R. Lau, A. Turner-Foster, M. Foster, M. Lipson, A. Gaeta, and K. Bergman, "Simultaneous wavelength conversion of ASK and DPSK signals based on four-wave-mixing in dispersion engineered silicon waveguides," Opt. Express 19, 12172-12179 (2011).


Rotating Circular Micro-Platform with Integrated Waveguides and
Latching Arm for Reconfigurable Integrated Optics

This work presents a laterally rotating micromachined platform integrated under optical waveguides to control the in-plane propagation direction of light within a die to select one of multiple outputs. The platform is designed to exhibit low constant optical losses throughout the motion range and is actuated electrostatically using an optimized circular comb drive. An angular motion of ±9.5° using 180 V is demonstrated. To minimize the optical losses between the moving and fixed parts, a gap-closing mechanism is implemented to reduce the initial air gap to submicron values. A latch structure is implemented to hold the platform in place with a resolution of 0.25° over the entire motion range. The platform was integrated with silicon nitride waveguides to create a crossbar switch and preliminary optical measurements are reported. In the bar state, the loss was measured to be 14.8 dB with the gap closed whereas in the cross state it was 12.2 dB. To the authors’ knowledge, this is the first optical switch based on a rotating microelectromechanical device with integrated silicon nitride waveguides reported to date.

Fig. 1. Example applications of the proposed actuator: (a) schematic of the crossbar switch; (b) schematic of the 1 × N mirror-based switch; (c) cross-section of the key material stack.

Fig. 2. SEM micrograph of a fabricated crossbar switch